• Standard Conversion Specifications
			: Perkin Elmer Micralign 5xx/6x1HT Projection Aligner converted to 150 mm : OS2000 18.x Operating System with Touch Screen Technology : (AFA) Cognex Pattern Recognition Vision Software 2.3.2 : (AVM) Automatic Variable Magnification : 3 Channel Uniformity Testing : Dual Pitch Elevators : Air Gage Auto Focus Positioning with self-starting actuators : Wafer/Mask stages for 150mm wafers : Platform for 150mm wafer fluoroware cassette : Top access cooling : 150mm Pal Wafer Handler Featuring Quick Align with Auto Rough technology : High Thruput Coated Optics (HT) : Mini-Mag or Kaman Gauge Strong Shells Positioning : Helium Management System : Motorized Carousel Arm : Pellicle Protection Cassette System : 7.25 Mask Carrier and Holder Installation: Included, travel expenses billed to customer Warranty: 6 Months parts & labor. Travel expenses paid by Customer
	EQUIPMENT ACCEPTANCE CRITERIA MODEL PERKIN ELMER 661 HT
			Item 001: Uniformity A. Open slit uniformity to be 6 percent of less B. Adjusted uniformity to be 3 percent or less C. Adjusted scan speed to be greater than 1.000 in per second with aperture 1 selected and 100 mj at the wafer plane. Item 002: Astigmatism A. 90 degree astigmatism to be 2 microns or less as defined by seimen star rows 1,2,3,4,5. B. 45 degree astigmatism to be 2 microns or less as defined by seimen star rows 1,2,3,4,5. Item 003: Depth of Focus A. 1.25 micron lines and spaces as determined by focus wedge data for a depth of focus ± 6 microns. Uv4, aperture 4. B. This test may also be performed using a meander mask while shifting through the focus plane. It will be left to the customers discretion. Item 004: Magnification/Alignment A. X mag, Y mag and Theta mag all to be equal to or less than .25 micron 98 percent of data population. B. X cross scan, Y1 and Yr alignment sites to be equal to or less than .30 microns. C. Machine to machine total distortion will be equal to or less than .30 microns 98 percent of data population. D. All overlay testing will be done using a tested and approved overlay mask/wafer set for a 2 day duration acceptance test, totaling data from 6 wafers each day. Item 005: Wafer Handling A. System will handle 250 wafers consecutively from input boat to output boat with automatic fine alignment enabled, 100 mj aperture #1 setting for exposure. B. All wafers handled will be free from added defects due to the wafer handling of the system. C. System will handle 100 wafers per hour as tested using the OEM procedure. Item 006: Mask Handling A. System will change masks ten times without a handling fault. B. There will be no scratches added to the pellicle or any other type apparent defects. Item 007: Contamination A. Facility added contaminants excluded, the system will not add more than 50 contaminants .3 micron in size.
	top
		Beta Squared Lithography. Refurbish Program for Perkin-Elmer/SVGL Projection Mask Aligner
			Item #001 Elevators Belts replaced w/new Lead screw cleaned and lubed Elevator platforms anodized Item # 002 Prealigner assembly Anchor flexures checked for play replaced if necessary Theta motors replaced with new Spinner motor replaced with new Track covers anodized Item # 003 Load Hand New suction cups New backing plate New anodize Item # 004 Carousel Arm New suction cups New backing plates New inner seals and bearings New anodize Item # 005 High Thruput Condenser Secondary recoated Torroid Recoated Shutter replaced with new Illuminator lens replaced with new Item # 006 High Thru-put Relay All optics recoated New aperture drive belt installed New airpots for atenic filter New wg320 filter and compensators Item # 007 Unload Arm New suction cups Item # 008 Power Supplies 5/15/24 Checked for A/C noise replaced if above 20 mv Item # 009 Panels/Covers New paint applied Item # 010 V/P Bimorphs All four ceramic benders replaced with new All four Transducers replaced with new Item # 011 Scan Package All gear drives cleaned and lubed All drive clutches tightened Complete optical alignment checked and aligned if necessary Item # 012 Gear Boxes All Gear boxes checked for travel limits All Gear boxes checked for backlash replaced if out of spec. Item # 013 Binocular Replaced with new style adjustable Item # 014 Lamp New lamp high voltage pigtail provided Item # 015 Chuck Set up to nominal wafer plane Defect free platen no hot spots Item #016 Helium Regulator New Auto Helium Monitor Item # 017 HEPA New HEPA filter Installed Item # 018 Hosing All hosing replaced with new
	top