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Beta Squared Lithography
Simple to use, highly effective
Helium Regulator
Helium Regulator
Back View
Provides finer control of
Projection Optics He atmosphere
Back View
A simple to use, yet highly effective
He environment controller for the
Micralign 500/600/700 series tool.

Overview
Our Helium Regulator and hose kit is designed to do fine control of helium pressure in the Projection Optics. It incorporates a pressure meter gauge, located on the front panel, with user adjustable upper and lower pressure limits. A power on /off switch, green, yellow, and red indicator lights are also located on the front panel for ease of use. A time delay relay is mounted on the rear panel to allow admission of a fixed, user adjustable amount of helium whenever the lower pressure limit is reached. A power cord receptacle, circuit breaker, and a fill and dump port connector are also located on the rear panel. This can be supplied in a 110volt or 220volt system. Installation of this unit can be done within a couple of hours and it is user friendly (Hose & Go). The Helium Regulator is a simple yet highly effective He environment controller for the Micralign 500/600/700 series machines.

Key Features
  • The green indicator light illumination:
    Indicates that power is applied to the unit.
  • The yellow indicator light illumination:
    Indicates that helium is being filled into the system.
    Excessive operation of the lamp may indicate that the unit has detected a helium leak with the system.
  • The red indicator light illumination:
    Indicates that the helium pressure has risen to the user’s selected upper limit. And that helium is being dumped from the system.
    Excessive operation of the lamp (cycling on and off) may indicate a problem with the system.
  • The Photohelic pressure meter gauge:
    Allows fine adjustments to upper and lower pressure limits of the machine’s helium environment.
  • The time delay relay:
    Allows adjustment of the fill time, to a mid-point between upper and lower limits on the Photohelic pressure meter gauge (of helium being put into the system).
  • The Hose & Go feature:
    Allows the user to have the Helium Regulator hosed up to the machine & running within two hours.
    Can replace any existing helium systems, and can be mounted external of the machine.
    Also with our hose kit and connector port, it allows for easy installation by the user, (within two hours) with minimal down time to the system and lost production.

Operation
During normal operation, the green indicator light will remain illuminated as long as there is power to the unit & the power switch is on. The user will adjust upper and lower limits on the Photohelic pressure meter gauge, for the amount of helium pressure desired in the machine. As the system is being filled with helium, the yellow indicator light will illuminate. Due to the operation of the time delay relay, the lamp should remain illuminated until it reaches a mid-point between the upper and lower preset limits. The time delay relay determines the length of time the helium inlet solenoid will be energized after the pressure has risen above the lower limit. The user should adjust the time delay relay as such that the pressure reaches a desired point between the upper and lower preset limits. Once it has reached that point, the yellow indicator lamp will then go out. When the red indicator light illuminates the helium pressure has reached the user’s upper limit preset, which is connected to a dump solenoid. The unit, at that point, will vent pressure from the system and remove power from the time delay relay and the helium inlet solenoid. Once the system has been vented the indicator light will go out.
The active control design allows this unit to run more efficiently with less helium usage.