Beta Squared Lithography

We have a Micralign re-build and retrofit service.
including:
• Fully Refurbished and Warranted Micralign tools
• Wafer size changes
• Air-track to PAL conversions
• 900 Manifold Upgrades
• Re-hosing (replacement of every hose in the tool)

Refurbishment Program Specifications

6" Conversion Specifications

Micralign Photolithography Tool Maintenance

Beta Squared Lithography provides high quality, custom maintenance services supplied according to the customer's needs.
•Programmed Maintenance
We can support both local and long-range overseas customers through Preventative Maintenance programs. We use the program to keep equipment optimized and to simultaneously train operators and maintenance engineers. As the program advances, the customer quickly becomes more self-reliant for machine support until they are ultimately self-sufficient.

•On-Demand Emergency Service
On-Demand Emergency Services are always supplied on a first-come, first-serve basis. This service can normally be called upon with a service response time of 8 to 24 hours. Specific response times and costs can be tailored to the customer's needs.






		We have a Micralign re-build and retrofit service. including: • Fully Refurbished and Warranted Micralign tools • Wafer size changes • Air-track to PAL conversions • 900 Manifold Upgrades • Re-hosing (replacement of every hose in the tool)
	Refurbishment Program Specifications
	6" Conversion Specifications
Micralign Photolithography Tool Maintenance
Beta Squared Lithography provides high quality, custom maintenance services supplied according to the customer's needs. •Programmed Maintenance We can support both local and long-range overseas customers through Preventative Maintenance programs. We use the program to keep equipment optimized and to simultaneously train operators and maintenance engineers. As the program advances, the customer quickly becomes more self-reliant for machine support until they are ultimately self-sufficient. •On-Demand Emergency Service On-Demand Emergency Services are always supplied on a first-come, first-serve basis. This service can normally be called upon with a service response time of 8 to 24 hours. Specific response times and costs can be tailored to the customer's needs.