Engineering Services
Machine Services
Add-On Products
Company Information
Beta Squared Lithography
What we do
Services
• Complete Machine Servicing (emergency, on-call, and contract)
• Optical Alignment
---Primary/Secondary Mirror C-of-C Adjustment
---Strong/Weak Shells
• Complete Optical Re-coating for Condenser & Relay Assemblies
Repairs
• Most Electro-mechanical Assemblies (e.g. gearboxes, carousel arms, chucks, etc.)
• Electronic Circuit boards
• Bi-morph boards (V-to-P boards)
New/Replacement Parts
• Stage Assemblies
• Wafer Handling/Pneumatic Parts (e.g. Load Arms, Carousel Arms, etc)
• Optical components (e.g. Secondaries, Toroids, Illuminators)
• Tilting Binocular Heads
Upgrades
• OS2000 - Machine Control System replacement
• Helium Regulator
• Machine Re-hosing
• Size Conversions
• Air Track to Pick & Place
• Multi-thickness Chucks
Machine Sales
• Completely Refurbished to Factory Specs.
• Custom Modifications to alternate substrates (FPD, Thin-Film Heads, MEMS, Pyrex)